JPH0456766B2 - - Google Patents

Info

Publication number
JPH0456766B2
JPH0456766B2 JP60211000A JP21100085A JPH0456766B2 JP H0456766 B2 JPH0456766 B2 JP H0456766B2 JP 60211000 A JP60211000 A JP 60211000A JP 21100085 A JP21100085 A JP 21100085A JP H0456766 B2 JPH0456766 B2 JP H0456766B2
Authority
JP
Japan
Prior art keywords
boron nitride
pyrolytic boron
vapor deposition
pbn
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60211000A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6272505A (ja
Inventor
Masaharu Suzuki
Taku Kawasaki
Hiroaki Tanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP21100085A priority Critical patent/JPS6272505A/ja
Publication of JPS6272505A publication Critical patent/JPS6272505A/ja
Publication of JPH0456766B2 publication Critical patent/JPH0456766B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP21100085A 1985-09-26 1985-09-26 熱分解窒化ほう素製器物の製造法 Granted JPS6272505A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21100085A JPS6272505A (ja) 1985-09-26 1985-09-26 熱分解窒化ほう素製器物の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21100085A JPS6272505A (ja) 1985-09-26 1985-09-26 熱分解窒化ほう素製器物の製造法

Publications (2)

Publication Number Publication Date
JPS6272505A JPS6272505A (ja) 1987-04-03
JPH0456766B2 true JPH0456766B2 (en]) 1992-09-09

Family

ID=16598664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21100085A Granted JPS6272505A (ja) 1985-09-26 1985-09-26 熱分解窒化ほう素製器物の製造法

Country Status (1)

Country Link
JP (1) JPS6272505A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5372178A (en) * 1989-01-13 1994-12-13 Lanxide Technology Company, Lp Method of producing ceramic composite bodies
JPH0431309A (ja) * 1990-05-24 1992-02-03 Shin Etsu Chem Co Ltd 熱分解窒化ほう素成形体の製造方法
JPH05105523A (ja) * 1991-10-17 1993-04-27 Shin Etsu Chem Co Ltd 熱分解窒化ほう素成形体の製造方法
JP2720381B2 (ja) * 1995-10-03 1998-03-04 アドバンス・セラミックス・インターナショナル コーポレーション 任意の電気抵抗率を有する熱分解窒化ホウ素成形体の製造方法
CA2711146A1 (en) * 2007-12-31 2009-07-09 Rafael Nathan Kleiman High efficiency silicon-based solar cells
JP2013234369A (ja) * 2012-05-10 2013-11-21 Shin-Etsu Chemical Co Ltd グラファイト材に熱分解窒化ほう素をコーティングする方法及びその方法によって得られた被覆物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986822A (en) * 1975-02-27 1976-10-19 Union Carbide Corporation Boron nitride crucible
JPS6040888B2 (ja) * 1980-04-04 1985-09-13 工業技術院長 気相堆積法によるバルク材料の製造方法
JPS5927725B2 (ja) * 1980-12-25 1984-07-07 工業技術院長 ＺｎＳｅ多結晶バルクの製造方法

Also Published As

Publication number Publication date
JPS6272505A (ja) 1987-04-03

Similar Documents

Publication Publication Date Title
KR101593922B1 (ko) 화학기상증착법에 의한 반도체 공정용 다결정 탄화규소 벌크 부재 및 그 제조방법
JPH0456765B2 (en])
EP0206120B1 (en) Pyrolytic boron nitride crucible and method for producing the same
JPH03274271A (ja) ダイヤモンド薄膜コーティング部材およびダイヤモンド薄膜コーティング方法
JPH0456766B2 (en])
WO2021117498A1 (ja) 炭化タンタル被覆グラファイト部材及びその製造方法
US3041690A (en) Processing semiconductor material
EP0457444B1 (en) Boat of boron nitride and its production
JPH0688866B2 (ja) 窒化ホウ素被覆ルツボおよびその製造方法
JPS6374995A (ja) エピタキシヤル成長用黒鉛材料
JPS61251593A (ja) 高純度半導体単結晶製造用ルツボ
US5182149A (en) Boron nitride boat and process for producing it
JPS62176981A (ja) 窒化ホウ素被覆ルツボ
JP2708612B2 (ja) 熱分解窒化ほう素成形体の製造方法
JPH0798708B2 (ja) 熱分解窒化ホウ素被覆物品の製造方法
JPS61236672A (ja) 熱分解窒化ホウ素被覆物品及びその製法
JPH053410B2 (en])
JP2588540B2 (ja) 熱分解窒化ホウ素容器
JPS63123892A (ja) ２−６族化合物単結晶成長用ボ−ト
JP2507739B2 (ja) 熱分解窒化ホウ素製容器
JPS61219787A (ja) 高純度半導体単結晶製造用ルツボ
JPH04132677A (ja) 融液加圧法による薄板状単結晶の製造方法
JPH0784357B2 (ja) 窒化ホウ素被覆ルツボ
JPH0154432B2 (en])
JPH0455160B2 (en])